Kwimveliso ye-semiconductor, iinkqubo zokusasazwa kwe-cryogenic kulindeleke ukuba zenze okungaphezulu kokudlulisa nje i-nitrogen engamanzi okanye i-argon ukusuka kwenye indawo ukuya kwenye. Ulwelo kufuneka luhlale luzinzile, lucocekile, kwaye lube yi-single-phase ukuya kwinqanaba lokusetyenziswa. Nokuba kuncinci ukungena kobushushu kunokuvelisa i-flash gas, ukutshintsha koxinzelelo, okanye ukungcola komswakama okuchaphazela uzinzo lwenkqubo.

Kungako kunjaloUmbhobho ogqunywe nge-vacuumiinkqubo zihlala zisetyenziswa kwi-semiconductor fabs endaweni yemibhobho eqhelekileyo efakwe i-foam insulation. Xa zidityaniswe ne-motor elawulwa kakuhleInkqubo yePompo yeDynamic Vacuum, ukuvuza kobushushu ngokubanzi kunokuhlala ngaphantsi kwe-3 W/m ngelixa kugcinwa uzinzo lwe-vacuum ixesha elide kulo lonke umgca wokudlulisa.

Kwizicelo ze-semiconductor, i-vacuum insulation akufuneki ibonwe njengomaleko ongasebenziyo ojikeleze umbhobho. Yinkqubo esebenzayo yobushushu efuna ukusebenza kwe-vacuum okulinganisekayo kunye nokugcinwa ixesha elide. Kwiindawo zokwenza ii-chip ezichanekileyo, nokuba ukunyuka okuncinci kobushushu bokugcwala kolwelo kunokukhokelela kwiimeko zokuhamba kwezigaba ezibini eziphazamisana neesekethe zokupholisa, iinkqubo zokucoca, okanye izixhobo zokulawula inkqubo.

Kutheni i-Heat Leak ibalulekile kwiiNkqubo ze-Cryogenic Semiconductor

Yonke imigca yokudlulisa i-cryogenic ichatshazelwa ziindlela ezintathu eziphambili zokudlulisa ubushushu:

• imitha yelanga kwindawo ejikelezileyo
• ukuqhutywa kwegesi okubangelwa ziimolekyuli eziseleyo
• ukuqhuba okuqinileyo ngokusebenzisa izixhasi kunye nee-spacers

Kwindlela eyilwe kakuhleUmbhobho ogqunywe nge-vacuum, uxinzelelo lwe-annular ludla ngokuncipha ngaphantsi kwe-1×10⁻⁴ Pa. Kwelo nqanaba le-vacuum, iimolekyuli zegesi eziseleyo zinendlela ephakathi ekhululekileyo enkulu kakhulu kune-annular gap, nto leyo enciphisa kakhulu ukuqhutywa kobushushu begesi.

Ukudluliselwa kobushushu obusebenzisa imisebe kulawulwa kusetyenziswa i-multi-layer insulation (MLI). I-insulation iqulathe iileya ezitshintshanayo ze-reflective foil kunye nezinto ezisebenzisa i-low-conductivity spacer material. Ngobuninzi beeleya kunye nendlela yokufakela, i-radiative heat flux ingancitshiswa ibe zii-watts ezimbalwa kuphela nge-square metre.

Indlela eseleyo yobushushu ivela ikakhulu kwiinkxaso zoomatshini. Ukunciphisa esi siphumo, kusetyenziswa izixhobo ezisebenzisa umbane ophantsi ezifana ne-G-10 fiberglass okanye iTorlon®. Ezi nkxaso zisafuna amandla aneleyo oomatshini ukuze zinyamezele ukuxinana kobushushu, ukungcangcazela, kunye nomthwalo wenyikima ngexesha lokusebenza.

Kwimigama emide yokudlulisa, umahluko phakathi kokufakwa kwe-vacuum insulation kunye nokufakwa kwe-foam ubonakala kakhulu. Inkqubo ye-vacuum egcinwe kakuhle inokugcina ukusebenza kobushushu okuzinzileyo kangangeminyaka emininzi, ngelixa ukufakwa kwe-foam insulation kuthatha kancinci umswakama ovela emoyeni. Nje ukuba umswakama ungene kwisakhiwo se-insulation uze uqine, ukusebenza kobushushu kudla ngokuhla ngokuhamba kwexesha.

Kwiinkqubo zokusasazwa kwe-LN₂ ze-semiconductor ezisebenzayo,imibhobho egqunywe nge-vacuuminokunciphisa ukubila kakhulu xa kuthelekiswa nemigca yendabuko efakwe i-foam insulated, ingakumbi kwiindlela ezinde zangaphandle okanye ezisebenza rhoqo kwiintloko eziphambili.

Inkqubo yePompo yeDynamic Vacuum

Ingxaki enye ngeejakethi ze-vacuum ezingashukumiyo kukuba umgangatho we-vacuum unokuwohloka kancinci ngokuhamba kweminyaka ngenxa yokuphuma kwegesi, ukungena kwe-helium, okanye ukuvuza okuncinci.

Ukujongana nale nto, ubukhulu bayo bukhuluUmbhobho ogqunywe nge-vacuumiinkqubo zinokuxhotyiswa ngeInkqubo yePompo yeDynamic VacuumInkqubo idla ngokuquka ilungiselelo le-compact turbomolecular okanye i-scroll pump elibuyisela rhoqo i-annular vacuum kwimeko yayo yoyilo lokuqala.

Amanqanaba omoya ajongwa rhoqo kusetyenziswa ii-cold-cathode gauges. Ipompo isebenza kuphela xa uxinzelelo lunyuka ngaphaya kwendawo ekujoliswe kuyo, ngoko ke ukusetyenziswa kwamandla kunye neemfuno zokugcinwa zihlala ziphantsi.

Kwiprojekthi enye yokuphucula izakhiwo ze-semiconductor eHsinchu, eTaiwan, inkqubo yokupompa i-vacuum elawulwa ngokukhutheleyo ivumele i-header yokudlulisa i-LN₂ endala ukuba ibuyisele ukusebenza kobushushu kufutshane nemeko yayo yokusebenza yokuqala ngaphandle kokuvala umgca wemveliso. Kwiiprojekthi ezintsha, ukugcinwa kwe-vacuum esebenzayo kukwanika abaqhubi ukuzithemba okungcono kuzinzo lwe-insulation yexesha elide kulo lonke ixesha lokusebenza kwenkqubo.

Izixhobo kunye noYilo lweNkqubo

Kwizicelo ze-semiconductor kunye ne-ultra-high-purity, umbhobho wenkqubo yangaphakathi udla ngokwenziwa ngentsimbi engagqwaliyo ye-304L okanye ye-316L. Iindawo zangaphakathi ziyacocwa, zicocwe, kwaye zingasetyenziswa ukuze kuhlangatyezwane neemfuno zenkonzo yokucoca ioksijini kunye nokunciphisa umngcipheko wongcoliseko.

Ijakethi yangaphandle ingasebenzisa intsimbi yekhabhoni epeyintiweyo okanye intsimbi engatyiwayo ngokuxhomekeke kwindawo yokufakela. Kwiindawo ezikufutshane negumbi lokucoca, iijakethi zangaphandle ezingatyiwayo zihlala zikhethwa ukuze kuthintelwe ukugqwala okanye ungcoliseko lomphezulu.

Ukuncitshiswa kobushushu nako kufuneka kuqwalaselwe ngononophelo. Umgca wokudlulisa we-LN₂ unokuncitshiswa malunga ne-2.5–3 mm ngemitha phakathi kobushushu obuphakathi kunye nobushushu bokusebenza. Ukuze kuthathwe olu tshintsho, ii-bellows-type expansion compensators zihlala zifakelwa kwiindawo ezibaliweyo ze-anchor kuyo yonke inethiwekhi yemibhobho.

Apho kufuneka intshukumo okanye ukuguquguquka,Umbhobho oguquguqukayo ogqunywe nge-vacuumIindibano zisetyenziswa kakhulu. Iindawo eziqhelekileyo ziquka uqhagamshelo lweetanki, izixhobo zokudibanisa, amasebe amaninzi, kunye neeskidi zenkqubo ezihambayo.

Ezi hoses eziguquguqukayo zisebenzisa i-corrugated inner core kunye ne-vacuum jacket kunye nesakhiwo se-MLI esifana nombhobho we-vacuum oqinileyo. Iindibano ezilungiselelwe kakuhle zinokugcina i-vacuum ingqibelelo emva kokujikeleza okuphindaphindiweyo kobushushu be-cryogenic ngelixa zithintela ukwakheka komkhenkce wangaphandle okuxhaphakileyo kwiihoses ezilukiweyo ezingagqunywanga.

Iivalvu ezifakwe i-vacuumkwayeAbahluli beSigaba

Ukulawula ukuvuza kobushushu akupheleli nje kwiindawo ezithe tye zemibhobho.abahluli besigabaikwadlala indima enkulu ekugcineni imeko yokuhamba kwamanzi ezinzileyo.

A Ivalvu Egqunywe Ngomoyaidla ngokusebenzisa ibhonethi ende kunye nomzimba ofakwe ijakethi ye-vacuum ukugcina iindawo ezibalulekileyo zokuvala kude namaqondo obushushu aphantsi kakhulu. Oku kunceda ukuthintela ukubanda okujikeleze ukupakisha kwesiqu kwaye kunciphisa ukufuma okungafunekiyo ngaphakathi kwesakhiwo sevalvu.

Ngaphandle kokufakwa kwe-vacuum insulation, iivalvu zinokuba ziindawo zokuvuza kobushushu obuqinileyo ngaphakathi kwenkqubo. Kwinkonzo ye-cryogenic yolwelo, oku kunokuvelisa iipokotho zomphunga ezikwindawo ethile, iimeko zokuhamba ezingazinzanga, okanye iziganeko ze-water hammer.

Kwiinkqubo zenkqubo ye-semiconductor, iivalvu zeglobe ze-bonnet ezinde kunye neevalvu zebhola ezifika phezulu zihlala zisetyenziswa ngokuhambelana neemfuno ze-ASME B31.3 kunye ne-EN 13480.

A Isahluli seSigaba esifakwe i-Vacuumisetyenziselwa ukususa igesi ekhanyayo ngaphambi kokuba ulwelo lungene kwizixhobo ezibuthathaka ezisezantsi. Kwizicelo ze-semiconductor, ukuhamba kwe-two-phase okungazinzanga kunokubangela ukujika koxinzelelo olukhulu ngokwaneleyo ukuba luqalise ii-alamu zenkqubo okanye ii-interlocks zezixhobo.

Uninzi lweendlela zokwahlulahlula zisebenzisa i-tangential inlet kunye nesakhiwo sangaphakathi se-demister ukuphucula ukusebenza kakuhle kokwahlulwa komphunga nolwelo. Kwiiprojekthi ezininzi, i-separator idityaniswe ne-Mini Tank efakwe kufutshane nomgangatho wenkqubo. I-mini tank isebenza njengomthamo we-buffer wendawo onceda ukuzinzisa ukuguquguquka kwemfuno yexesha elifutshane ngaphandle kokungenisa umthwalo wobushushu obalulekileyo.

Umzekelo weProjekthi yeSemiconductor

Iprojekthi yokwandiswa kwesakhiwo seDRAM eMzantsi Korea ifune inethiwekhi entsha yokusasazwa kwe-LN₂ enikezela ngezixhobo zokuvavanya ezipholileyo kunye nezixhobo zokucubungula iiwafer.

Olu fakelo luquke malunga neemitha ezili-180 zePipe eQinileyo yeVacuum Insulated edityaniswe kumasebe ezixhobo amaninzi ngokusebenzisa iindibano zeVacuum Insulated Flexible Hose. I-Vacuum Insulated Phase Separator kunye ne-2 m³ Mini Tank zifakelwe kufutshane nendawo yokugcina izinto ezininzi.

Inkqubo yeDynamic Vacuum Pump igcine uxinzelelo olungaphantsi kwe-5×10⁻⁶ mbar kwimigca ephambili yokudlulisa eyi-intshi ezi-6.

Ngexesha lokuqalisa ukusebenza, umlinganiselo wobushushu obufunyenweyo kwi-primary header wawumalunga ne-1.3 W/m phantsi kweemeko zokusebenza ezizinzileyo. Emva konyaka omnye wenkonzo eqhubekayo, imijikelo yokubuyisela i-vacuum rhoqo igcine ukusebenza kwe-insulation kufutshane nemeko yokuqala.

Xa kuthelekiswa nengcamango yangaphambili ye-foam-insulated, isikhungo sibike ukuba ilahleko ye-nitrogen engamanzi iphantsi kakhulu kwaye uzinzo oluphuculweyo lokusebenza luphucukile. Iingxelo zenkqubo azibonisanga ziganeko zongcoliseko olunxulumene nokufuma oluhambelana nokuwohloka kwe-insulation.

Izicelo

Iinkqubo zokudlulisa i-cryogenic ezifakwe kwi-vacuum zisetyenziswa kakhulu kwimveliso ye-semiconductor, kwiziseko ze-LNG, kwi-industrial gas distribution, nakwi-liquid hydrogen applications.

Nangona iimeko zokusebenza zahlukile, injongo yobunjineli ihlala ifana:

• gcina uzinzo lwe-vacuum
• nciphisa ukungena kobushushu
• gcina uzinzo lwesigaba kuyo yonke inkqubo yokudlulisela

Uyilo lwenkqubo ludla ngokulandela imigangatho yamazwe ngamazwe efana ne-ASME B31.3, i-EN 13480, kunye ne-ISO 21029 kuxhomekeke kububanzi beprojekthi kunye neemfuno zengingqi.

Kwizakhiwo ze-semiconductor, ukusebenza kwenkqubo yokusasazwa kwe-cryogenic kuchaphazela ngokuthe ngqo ukusebenza kakuhle, ukusetyenziswa kolwelo, kunye nokuthembeka kwenkqubo yexesha elide. Ngenxa yoko, iipayipi, iivalvu, izahluli, kunye neenkqubo zokugcinwa kwe-vacuum kufuneka ziyilwe njengenkqubo enye yobushushu edibeneyo kunokuba zibe zizinto ezizimeleyo.

At Ii-HL Cryogenics, sisebenzisana neenkampani ze-EPC, iinkampani zegesi, kunye nezibonelelo ze-semiconductor ukuphuhlisa izisombululo zokudlulisa i-cryogenic ngokusekelwe kwiimeko zokusebenza zangempela, iithagethi zomthwalo wobushushu, kunye neemfuno zokufakela endaweni yoqwalaselo lweekhathalogu eziqhelekileyo.

Ukuba uceba iprojekthi entsha ye-semiconductor fab okanye uphucula inethiwekhi yokusasazwa kwe-LN₂ ekhoyo, iqela lethu lobunjineli linokukunceda ukuvavanya ukusebenza kokuvuza kobushushu, icebo le-vacuum, kunye noqwalaselo lwenkqubo yokusebenza ixesha elide.