Ubuchwepheshe
I-molecular beam epitaxy, okanye i-MBE, yindlela entsha yokukhulisa iifilimu ezincinci zeekristale ezikumgangatho ophezulu kwi-crystal substrates. Kwiimeko ze-vacuum eziphezulu kakhulu, isitovu sokufudumeza sixhotyiswe ngazo zonke iintlobo zezinto ezifunekayo kwaye sivelise umphunga, ngokusebenzisa imingxunya eyenziwe emva kokudibanisa umqadi we-atomic okanye we-molecular beam, ijojo ngqo kubushushu obufanelekileyo be-single crystal substrate, ilawula umqadi we-molecular kwi-substrate scanning ngaxeshanye, inokwenza iimolekyuli okanye ii-athomu kwi-crystal alignment layers zenze ifilimu encinci kwi-substrate "growth".
Ukuze kusebenze kakuhle izixhobo ze-MBE, kufuneka ubunyulu obuphezulu, uxinzelelo oluphantsi kunye ne-nitrogen engamanzi ecocekileyo kakhulu ithuthwe rhoqo nangokuzinzileyo ukuya kwigumbi lokupholisa lezixhobo. Ngokubanzi, itanki enika i-nitrogen engamanzi inoxinzelelo oluphumayo oluphakathi kwe-0.3MPa kunye ne-0.8MPa. I-nitrogen engamanzi kwi--196℃ inyibilikiswa lula ibe yi-nitrogen ngexesha lokuthuthwa kwepayipi. Nje ukuba i-nitrogen engamanzi enomlinganiselo wegesi-ulwelo omalunga ne-1:700 ifakwe igesi kwipayipi, iya kuthatha indawo enkulu yokuhamba kwe-nitrogen engamanzi kwaye inciphise ukuhamba okuqhelekileyo ekupheleni kombhobho we-nitrogen engamanzi. Ukongeza, kwitanki yokugcina i-nitrogen engamanzi, kusenokwenzeka ukuba kukho inkunkuma engakhange icocwe. Kwipayipi ye-nitrogen engamanzi, ukubakho komoya omanzi kuya kukhokelela ekudalweni kwe-ice slag. Ukuba ezi zinto zingcolileyo zikhutshwa kwizixhobo, ziya kubangela umonakalo ongalindelekanga kwizixhobo.
Ngoko ke, i-nitrogen engamanzi ekwitanki yokugcina yangaphandle ithuthwa iye kwizixhobo ze-MBE kwindawo yokusebenzela engenathuli ngokusebenza kakuhle, uzinzo kwaye icocekile, kwaye uxinzelelo oluphantsi, akukho nitrogen, akukho kungcola, iiyure ezingama-24 ngaphandle kokuphazanyiswa, inkqubo enjalo yolawulo lokuthuthwa yimveliso efanelekileyo.
Izixhobo zokufanisa ze-MBE
Ukususela ngo-2005, i-HL Cryogenic Equipment (HL CRYO) ibisoloko iphucula le nkqubo kwaye isebenzisana nabavelisi bezixhobo ze-MBE bamazwe ngamazwe. Abavelisi bezixhobo ze-MBE, kuquka i-DCA, i-REBER, banobudlelwane bentsebenziswano nenkampani yethu. Abavelisi bezixhobo ze-MBE, kuquka i-DCA kunye ne-REBER, baye basebenzisana kwinani elikhulu leeprojekthi.
I-Riber SA ngumboneleli ohamba phambili kwihlabathi liphela weemveliso ze-molecular beam epitaxy (MBE) kunye neenkonzo ezinxulumene noko zophando lwe-compound semiconductor kunye nezicelo zoshishino. Isixhobo se-Riber MBE sinokubeka iileya ezincinci kakhulu zezinto kwi-substrate, ngolawulo oluphezulu kakhulu. Izixhobo ze-vacuum ze-HL Cryogenic Equipment (HL CRYO) zixhotyiswe nge-Riber SA. Esona sixhobo sikhulu yi-Riber 6000 kwaye esincinci yi-Compact 21. Sikwimeko entle kwaye siqatshelwe ngabathengi.
I-DCA yeyona MBE iphambili kwihlabathi. Ukususela ngo-1993, uphuhliso olucwangcisiweyo lweendlela zokuxilisa, ukufudumeza i-antioxidant substrate kunye nemithombo ye-antioxidant luye lwenziwa. Ngesi sizathu, iilabhoratri ezininzi eziphambili zikhethe itekhnoloji ye-DCA oxide. Iinkqubo ze-MBE ze-semiconductor ezihlanganisiweyo zisetyenziswa kwihlabathi liphela. Inkqubo ye-VJ liquid nitrogen circulating system ye-HL Cryogenic Equipment (HL CRYO) kunye nezixhobo ze-MBE zeemodeli ezininzi ze-DCA zinamava afanayo kwiiprojekthi ezininzi, ezifana nemodeli ye-P600, i-R450, i-SGC800 njl.
Itheyibhile Yokusebenza
| IZiko leFiziksi yoBugcisa laseShanghai, iZiko leSayensi laseTshayina |
| I-11th Institute of China Electronics Technology Corporation |
| I-Institute of Semiconductors, i-Chinese Academy of Sciences |
| IHuawei |
| Isikolo i-Alibaba DAMO |
| Itekhnoloji yePowertech Inc. |
| I-Delta Electronics Inc. |
| I-Suzhou Everbright Photonics |
Ixesha lokuthumela: Meyi-26-2021
