Iindaba - IProjekthi yeChip MBE igqitywe kwiMinyaka edlulileyo

Iteknoloji

I-molecular beam epitaxy, okanye i-MBE, bubuchule obutsha bokukhulisa iifilimu ezikumgangatho ophezulu ezibhityileyo zeekristale kwi-crystal substrates. Kwiimeko ze-vacuum ephezulu kakhulu, ngesitovu sokufudumeza sixhotyiswe ngazo zonke iintlobo zamacandelo afunekayo kwaye ivelise umphunga, ngokusebenzisa imingxunya eyenziwe emva kokudibana kwe-atomic okanye i-molecular beam, isitofu esithe ngqo kwiqondo lokushisa elifanelekileyo le-crystal substrate enye, ukulawula umqa we-molecular. i-substrate scanning ngexesha elifanayo, inokwenza iimolekyuli okanye ii-athomu kwi-crystal alignment layers ukwenza ifilimu encinci kwi-substrate "yokukhula".

Ukusebenza okuqhelekileyo kwezixhobo ze-MBE, ukucoceka okuphezulu, uxinzelelo oluphantsi kunye ne-ultra-clean liquid nitrogen iyadingeka ukuba iqhubeke kwaye ihanjiswe ngokuzinzileyo kwigumbi lokupholisa lezixhobo. Ngokubanzi, itanki ebonelela ngenitrogen elulwelo inoxinzelelo lwemveliso phakathi kwe-0.3MPa kunye ne-0.8MPa.I-nitrogen ewulwelo ku--196℃ ifunzwa lula ibe yinitrogen ngexesha lothutho lwemibhobho. Nje ukuba ulwelo lwenitrogen olunomlinganiselo werhasi-ulwelo olumalunga ne-1:700 lufakwe igesi kumbhobho, luya kuthatha indawo enkulu yolwelo lokuhamba kwenitrogen kwaye lucuthe ukuhamba okuqhelekileyo ekupheleni kombhobho wenitrogen engamanzi. Ukongeza, kwitanki yokugcina i-nitrogen engamanzi, kunokwenzeka ukuba kubekho inkunkuma engazange icocwe. Kwimibhobho yenitrogen engamanzi, ubukho bomoya omanzi buya kukhokelela ekuvelisweni kwe-ice slag. Ukuba oku kungcola kukhutshwe kwisixhobo, kuya kubangela umonakalo ongalindelekanga kwisixhobo.

Ngoko ke, i-nitrogen yolwelo kwitanki yokugcina yangaphandle ithuthelwa kwisixhobo se-MBE kwi-workshop engenathuli kunye nokusebenza okuphezulu, ukuzinza kunye nokucoceka, kunye noxinzelelo oluphantsi, akukho nitrogen, akukho kungcola, iiyure ezingama-24 zingaphazamiseki, inkqubo enjalo yokulawula ukuthutha. imveliso efanelekileyo.

Ukuthelekisa izixhobo ze-MBE

Ukususela ngo-2005, i-HL Cryogenic Equipment (HL CRYO) iye yaphucula kwaye iphucula le nkqubo kunye nokusebenzisana nabavelisi bezixhobo ze-MBE zamazwe ngamazwe. Abavelisi bezixhobo ze-MBE, kuquka i-DCA, i-REBER, banobudlelwane bentsebenziswano kunye nenkampani yethu. Abavelisi bezixhobo ze-MBE, kuquka i-DCA kunye ne-REBER, baye basebenzisana kwinani elikhulu leeprojekthi.

I-Riber SA ngumboneleli okhokelayo wehlabathi jikelele weemveliso ze-molecular beam epitaxy (MBE) kunye neenkonzo ezinxulumene nophando lwe-semiconductor edibeneyo kunye nokusetyenziswa kwezoshishino. Isixhobo seRiber MBE sinokufaka iileya ezibhityileyo kakhulu kwi-substrate, ngolawulo oluphezulu kakhulu. Isixhobo sokufunxa se-HL Cryogenic Equipment (HL CRYO) sixhotyiswe nge-Riber SA Esona sixhobo sikhulu yi-Riber 6000 kwaye esona sincinci yiCompact 21. Sikwimeko entle kwaye sele samkelwe ngabathengi.

I-DCA yeyona oxide iphambili kwihlabathi i-MBE. Ukususela ngo-1993, uphuhliso olucwangcisiweyo lweendlela ze-oxidation, ukufudumeza kwe-antioxidant substrate kunye nemithombo ye-antioxidant yenziwe. Ngesi sizathu, iilebhu ezininzi eziphambili zikhethe iteknoloji ye-DCA oxide. Iinkqubo ezihlanganisiweyo ze-semiconductor MBE zisetyenziswa kwihlabathi jikelele. I-VJ liquid nitrogen circulating system ye-HL Cryogenic Equipment (HL CRYO) kunye nezixhobo ze-MBE zeemodeli ezininzi ze-DCA zinamava ahambelanayo kwiiprojekthi ezininzi, ezifana nemodeli ye-P600, i-R450, i-SGC800 njl.