Kwishishini le-semiconductor elikhawulezayo, ukugcina iimeko ezichanekileyo zokusingqongileyo kubalulekile kwiinkqubo zokuvelisa ezikumgangatho ophezulu.I-Molecular Beam Epitaxy (MBE), indlela ebalulekileyo yokwenza ii-semiconductor, inceda kakhulu kwinkqubela phambili kubuchwepheshe bokupholisa, ngakumbi ngokusebenzisa i-nitrogen engamanzi kunyeimibhobho egqunywe nge-vacuum (VIP)Le bhlog iphonononga indima ebalulekileyoI-VIPekuphuculeni MBEusetyenziso, kugxininiswa ukusebenza kwayo kakuhle kunye nokuthembeka kwayo.
Ukubaluleka Kokupholisa kwi-MBE
I-Molecular Beam Epitaxy (MBE)yindlela elawulwa kakhulu yokufaka iileya zeathomu kwi-substrate, ebalulekileyo ekuveliseni izixhobo ze-semiconductor ezifana nee-transistors, ii-laser, kunye neeseli zelanga. Ukufezekisa ukuchaneka okuphezulu okufunekayo kwi-MBE, ukugcina amaqondo obushushu aphantsi azinzileyo kubalulekile. I-nitrogen engamanzi idla ngokusetyenziswa kule njongo ngenxa yokuba iphantsi kakhulu kwi--196°C, ukuqinisekisa ukuba ii-substrate zihlala kumaqondo obushushu afunekayo ngexesha lenkqubo yokufaka.
Indima yeNitrogen yolwelo kwi-MBE
I-nitrogen engamanzi iyimfuneko kwiinkqubo ze-MBE, ibonelela ngendlela yokupholisa ehambelanayo eqinisekisa ukuba ukufakwa kwenzeka ngaphandle kokuguquguquka okungafunekiyo kobushushu. Olu zinzo lubalulekile ekuveliseni izixhobo ze-semiconductor ezikumgangatho ophezulu, njengoko nokutshintsha okuncinci kobushushu kunokukhokelela kwiziphene okanye ukungangqinelani kwiileya zeathomu. Ukusetyenziswa kwe-nitrogen engamanzi kunceda ekufezekiseni iimeko ze-vacuum eziphezulu kakhulu ezifunekayo kwi-MBE, ukuthintela ungcoliseko kunye nokuqinisekisa ubunyulu bezixhobo.
Iingenelo zeeMbhobho ezifakwe iVacuum Insulated (VIP) kwi-MBE
Imibhobho egqunywe nge-vacuum (VIP)ziyimpumelelo ekuthuthweni ngokufanelekileyo kwe-nitrogen engamanzi. Le mibhobho yenzelwe ukuba ibe nomaleko we-vacuum phakathi kweendonga ezimbini, nto leyo enciphisa kakhulu ukudluliselwa kobushushu kwaye igcina ubushushu be-nitrogen engamanzi buhlala buqinile njengoko ihamba ukusuka kwindawo yokugcina ukuya kwinkqubo ye-MBE. Olu yilo lunciphisa ukulahleka kwe-nitrogen engamanzi ngenxa yokufuma, nto leyo eqinisekisa ukunikezelwa okuzinzileyo nokuthembekileyo kwisixhobo se-MBE.
Ukusebenza kakuhle kunye nokuSebenza kakuhle kweendleko
UkusebenzisaI-VIPngaphakathiIzicelo ze-MBEInika iingenelo ezininzi. Ukulahleka kobushushu okunciphileyo kuthetha ukuba kufuneka i-nitrogen encinci yolwelo, nto leyo enciphisa iindleko zokusebenza kunye nokuphucula ukusebenza kakuhle. Ukongeza, iipropati zokukhusela ubushushuI-VIPnegalelo kwindawo yokusebenza ekhuselekileyo ngokunciphisa umngcipheko weqhwa kunye nezinye iingozi ezinxulumene nokuphatha izinto ezibangela ukurhawuzelelwa.
Uzinzo lweNkqubo oluPhuculweyo
I-VIPiqinisekisa ukuba i-nitrogen engamanzi ihlala kubushushu obufanayo kulo lonke uhambo lwayo ukuyaInkqubo ye-MBEOlu zinzo lubaluleke kakhulu ekugcineni iimeko ezingqongqo ezifunekayo kwimveliso ye-semiconductor echanekileyo kakhulu. Ngokuthintela ukutshintshatshintsha kobushushu,I-VIPinceda ekuveliseni iileya ze-semiconductor ezifanayo nezingenaziphene, nto leyo ephucula umgangatho kunye nokusebenza kweemveliso zokugqibela.
Izixhobo ze-HL Cryogenic: Zikhokela indlela ngeeNkqubo zokujikeleza kweNitrogen yolwelo eziPhambili
I-HL Cryogenic Equipment Co., Ltd iphuhlise kwaye iphanda ngobuchule obuphezuluInkqubo yokuHamba kweNitrogen yoLwaloiqala kwitanki yokugcina ize iphele ngezixhobo ze-MBE. Le nkqubo ifezekisa imisebenzi yokuthuthwa kwe-nitrogen engamanzi, ukukhutshwa kokungcola, ukunciphisa uxinzelelo kunye nokulawula, ukukhutshwa kwe-nitrogen, kunye nokurisayikilisha. Yonke le nkqubo ijongwa zizinzwa ze-cryogenic kwaye ilawulwa yi-PLC, ivumela ukutshintsha phakathi kweendlela zokusebenza ngokuzenzekelayo kunye nezandla.
Okwangoku, le nkqubo isebenza ngokuzinzileyo kwizixhobo ze-MBE ezivela kubavelisi abaphambili abanjengoDCA, RIBER, kunye ne-FERMI.Izixhobo ze-HL Cryogenic'Inkqubo ephucukileyo iqinisekisa ukunikezelwa kwe-nitrogen engamanzi okuthembekileyo nokufanelekileyo, okuphucula ngakumbi ukusebenza kunye nokuzinza kweenkqubo ze-MBE.
Isiphelo
Kwishishini le-semiconductor, ngakumbi kwi Izicelo ze-MBEukusetyenziswa kwe-nitrogen engamanzi kunyeimibhobho egqunywe nge-vacuum (VIP)ayinakuthintelwa.I-VIPayiphuculi nje kuphela ukusebenza kakuhle kunye nokusebenza kakuhle kweenkqubo zokupholisa kodwa ikwaqinisekisa uzinzo kunye nokuchaneka okufunekayo ekwenzeni ii-semiconductor ezikumgangatho ophezulu. Njengoko imfuno yezixhobo ze-semiconductor eziphambili iqhubeka nokukhula, izinto ezintsha kwiI-VIPubuchwepheshe kunye neenkqubo eziphambili ezifana nezo zenziwe yiIzixhobo ze-HL Cryogeniciza kudlala indima ebalulekileyo ekuhlangabezaneni neemfuno ezingqongqo zoshishino nasekuqhubeleni phambili inkqubela phambili kwixesha elizayo.
Ngokusebenzisa iingenelo zeI-VIPkwayeIzixhobo ze-HL Cryogenic'senobuchuleInkqubo yokuHamba kweNitrogen yoLwalo, abavelisi be-semiconductor banokufikelela kungqinelwano olukhulu, ukusebenza kakuhle, kunye nokhuseleko kwiinkqubo zabo ze-MBE, ekugqibeleni banegalelo kuphuhliso lwezixhobo ze-elektroniki zesizukulwana esilandelayo.
Ixesha leposi: Juni-15-2024
